Pillar phase change memory cell

ABSTRACT

A memory cell includes a first electrode, a storage location, and a second electrode. The storage location includes a phase change material and contacts the first electrode. The storage location has a first cross-sectional width. The second electrode contacts the storage location and has a second cross-sectional width greater than the first cross-sectional width. The first electrode, the storage location, and the second electrode form a pillar phase change memory cell.

BACKGROUND

One type of memory is resistive memory. Resistive memory utilizes the resistance value of a memory element to store one or more bits of data. For example, a memory element programmed to have a high resistance value may represent a logic “1” data bit value, and a memory element programmed to have a low resistance value may represent a logic “0” data bit value. The resistance value of the memory element is switched electrically by applying a voltage pulse or a current pulse to the memory element. One type of resistive memory is phase change memory. Phase change memory uses a phase change material for the resistive memory element.

Phase change memories are based on phase change materials that exhibit at least two different states. Phase change material may be used in memory cells to store bits of data. The states of phase change material may be referred to as amorphous and crystalline states. The states may be distinguished because the amorphous state generally exhibits higher resistivity than does the crystalline state. Generally, the amorphous state involves a more disordered atomic structure, while the crystalline state involves a more ordered lattice. Some phase change materials exhibit more than one crystalline state, e.g. a face-centered cubic (FCC) state and a hexagonal closest packing (HCP) state. These two crystalline states have different resistivities and may be used to store bits of data. In the following description, the amorphous state generally refers to the state having the higher resistivity, and the crystalline state generally refers to the state having the lower resistivity.

Phase change in the phase change materials may be induced reversibly. In this way, the memory may change from the amorphous state to the crystalline state and from the crystalline state to the amorphous state in response to temperature changes. The temperature changes to the phase change material may be achieved in a variety of ways. For example, a laser can be directed to the phase change material, current may be driven through the phase change material, or current can be fed through a resistive heater adjacent the phase change material. In any of these methods, controllable heating of the phase change material causes controllable phase change within the phase change material.

A phase change memory including a memory array having a plurality of memory cells that are made of phase change material may be programmed to store data utilizing the memory states of the phase change material. One way to read and write data in such a phase change memory device is to control a current and/or a voltage pulse that is applied to the phase change material. The level of current and/or voltage generally corresponds to the temperature induced within the phase change material in each memory cell.

Typical fabrication of a phase change memory cell having a pillar cell structure involves an etching process. A pillar cell structure includes a bottom electrode, phase change material, and a top electrode. The thickness of the top electrode of the phase change memory cell may not be uniform, which contributes to uneven etching over the wafer. In addition, the etch rate for phase change material may be higher than the etch rate for the top electrode material. This difference in etch rates may result in the etch process being stopped too early or too late. If the etch process is stopped too early or too late, the pillar cell may not be uniform and may become structurally unstable.

For these and other reasons, there is a need for the present invention.

SUMMARY

One embodiment of the present invention provides a memory cell. The memory cell includes a first electrode, a storage location, and a second electrode. The storage location includes a phase change material and contacts the first electrode. The storage location has a first cross-sectional width. The second electrode contacts the storage location and has a second cross-sectional width greater than the first cross-sectional width. The first electrode, the storage location, and the second electrode form a pillar phase change memory cell.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a further understanding of the present invention and are incorporated in and constitute a part of this specification. The drawings illustrate the embodiments of the present invention and together with the description serve to explain the principles of the invention. Other embodiments of the present invention and many of the intended advantages of the present invention will be readily appreciated as they become better understood by reference to the following detailed description. The elements of the drawings are not necessarily to scale relative to each other. Like reference numerals designate corresponding similar parts.

FIG. 1 is a block diagram illustrating one embodiment of a memory device.

FIG. 2A illustrates a cross-sectional view of one embodiment of a phase change memory cell.

FIG. 2B illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 3 illustrates a cross-sectional view of one embodiment of a preprocessed wafer.

FIG. 4A illustrates a cross-sectional view of one embodiment of the preprocessed wafer and a phase change material layer.

FIG. 4B illustrates a cross-sectional view of one embodiment of the preprocessed wafer and a stack of phase change material layers.

FIG. 5 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the phase change material layer, and a resist mask layer.

FIG. 6 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the phase change material layer, and the resist mask layer after a resist trim process.

FIG. 7 illustrates a cross-sectional view of one embodiment of the preprocessed wafer and a storage location after etching the phase change material layer.

FIG. 8 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the storage location, and a dielectric material layer.

FIG. 9A illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the storage location, the dielectric material layer, and an insulation material layer.

FIG. 9B illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the storage location, the dielectric material layer, an etch stop material layer, and an insulation material layer.

FIG. 10 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the storage location, the dielectric material layer, and the insulation material layer after etching an opening in the insulation material layer.

FIG. 11 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the storage location, the dielectric material layer, and an electrode material layer.

FIG. 12 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the storage location, the dielectric material layer, and a second electrode after etching the electrode material layer.

FIG. 13A illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 13B illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 14 illustrates a cross-sectional view of one embodiment of the preprocessed wafer and a contact material layer.

FIG. 15 illustrates a cross-sectional view of one embodiment of the preprocessed wafer and a bottom contact after etching the contact material layer.

FIG. 16 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the bottom contact, and an insulation material.

FIG. 17 illustrates a cross-sectional view of one embodiment of the preprocessed wafer and an insulation material layer.

FIG. 18 illustrates a cross-sectional view of one embodiment of the preprocessed wafer and insulation material after etching the insulation material layer.

FIG. 19 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the insulation material, and a bottom contact.

FIG. 20A illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 20B illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 21 illustrates a cross-sectional view of one embodiment of a preprocessed wafer.

FIG. 22 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, a contact material layer, and a phase change material layer.

FIG. 23 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the contact material layer, the phase change material layer, and a resist mask layer.

FIG. 24 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the contact material layer, the phase change material layer, and the resist mask layer after a resist trim process.

FIG. 25 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the contact material layer, and a storage location after etching the phase change material layer.

FIG. 26 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the contact material layer, the storage location, and a dielectric material layer.

FIG. 27 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, a bottom contact, the storage location, and dielectric material after etching the dielectric material layer and the contact material layer.

FIG. 28 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the bottom contact, the storage location, the dielectric material and insulation material.

FIG. 29A illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 29B illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 30 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the storage location, and a dielectric material layer.

FIG. 31A illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 31B illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 32A illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 32B illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 33 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the contact material layer, the storage location, and a dielectric material layer.

FIG. 34A illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 34B illustrates a cross-sectional view of another embodiment of a phase change memory cell.

FIG. 35 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, a bottom contact, and a storage location after etching the phase change material layer and the contact material layer.

FIG. 36 illustrates a cross-sectional view of one embodiment of the preprocessed wafer, the bottom contact, the storage location, and a dielectric material layer.

DETAILED DESCRIPTION

In the following Detailed Description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology, such as “top,” “bottom,” “front,” “back,” “leading,” “trailing,” etc., is used with reference to the orientation of the Figure(s) being described. Because components of embodiments of the present invention can be positioned in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

FIG. 1 is a block diagram illustrating one embodiment of a memory device 100. Memory device 100 includes a write circuit 102, a distribution circuit 104, memory cells 106 a, 106 b, 106 c, and 106 d, and a sense circuit 108. Each of the memory cells 106 a-106 d is a phase change memory cell that stores data based on the amorphous and crystalline states of phase change material in the memory cell. Also, each of the memory cells 106 a-106 d can be programmed into one of two or more states by programming the phase change material to have intermediate resistance values. To program one of the memory cells 106 a-106 d to an intermediate resistance value, the amount of crystalline material coexisting with amorphous material—and hence the cell resistance—is controlled using a suitable write strategy.

As used herein, the term “electrically coupled” is not meant to mean that the elements must be directly coupled together and intervening elements may be provided between the “electrically coupled” elements.

Write circuit 102 is electrically coupled to distribution circuit 104 though signal path 110. Distribution circuit 104 is electrically coupled to each of the memory cells 106 a-106 d through signal paths 112 a-112 d. Distribution circuit 104 is electrically coupled to memory cell 106 a through signal path 112 a. Distribution circuit 104 is electrically coupled to memory cell 106 b through signal path 112 b. Distribution circuit 104 is electrically coupled to memory cell 106 c through signal path 112 c. Distribution circuit 104 is electrically coupled to memory cell 106 d through signal path 112 d. In addition, distribution circuit 104 is electrically coupled to sense circuit 108 through signal path 114, and sense circuit 108 is electrically coupled to write circuit 102 through signal path 116.

Each of the memory cells 106 a-106 d includes a phase change material that may be changed from an amorphous state to a crystalline state or from a crystalline state to an amorphous state under the influence of temperature change. The amount of crystalline phase change material coexisting with amorphous phase change material in one of the memory cells 106 a-106 d thereby defines two or more states for storing data within memory device 100.

Memory cells 106 a-106 d are pillar memory cells. In general, pillar memory cells include processing steps during fabrication in which phase change material is deposited and then etched to form free-standing portions of phase change material. In one embodiment of the present invention, the pillar memory cells are fabricated by forming a phase change material storage location contacting a first electrode and then forming a second electrode contacting the phase change material storage location. The phase change material storage location is fabricated by depositing a phase change material over an electrode, patterning the phase change material, and etching the phase change material to form the storage location. The storage location is then surrounded by dielectric material by depositing dielectric material over the phase change material and planarizing the dielectric material. The second electrode is then fabricated over the storage location using one or more deposition, patterning, and etching processes.

In the amorphous state, a phase change material exhibits significantly higher resistivity than in the crystalline state. Therefore, the two or more states of memory cells 106 a-106 d differ in their electrical resistivity. In one embodiment, the two or more states include two states and a binary system is used, wherein the two states are assigned bit values of “0” and “1”. In another embodiment, the two or more states include three states and a trinary system is used, wherein the three states are assigned bit values of “0”, “1”, and “2”. In another embodiment, the two or more states includes four states that are assigned multi-bit values, such as “00”, “01”, “10”, and “11”. In other embodiments, the two or more states can be any suitable number of states in the phase change material of a memory cell.

In one embodiment, write circuit 102 provides voltage pulses to distribution circuit 104 through signal path 110, and distribution circuit 104 controllably directs the voltage pulses to memory cells 106 a-106 d through signal paths 112 a-112 d. In one embodiment, distribution circuit 104 includes a plurality of transistors that controllably direct voltage pulses to each of the memory cells 106 a-106 d. In other embodiments, write circuit 102 provides current pulses to distribution circuit 104 through signal path 110, and distribution circuit 104 controllably directs the current pulses to memory cells 106 a-106 d through signal paths 112 a-112 d.

Sense circuit 108 reads each of the two or more states of memory cells 106 a-106 d through signal path 114. Distribution circuit 104 controllably directs read signals between sense circuit 108 and memory cells 106 a-106 d through signal paths 112 a-112 d. In one embodiment, distribution circuit 104 includes a plurality of transistors that controllably direct read signals between sense circuit 108 and memory cells 106 a-106 d. In one embodiment, to read the resistance of one of the memory cells 106 a-106 d, sense circuit 108 provides current that flows through one of the memory cells 106 a-106 d and sense circuit 108 reads the voltage across that one of the memory cells 106 a-106 d. In one embodiment, sense circuit 108 provides voltage across one of the memory cells 106 a-106 d and reads the current that flows through that one of the memory cells 106 a-106 d. In one embodiment, write circuit 102 provides voltage across one of the memory cells 106 a-106 d and sense circuit 108 reads the current that flows through that one of the memory cells 106 a-106 d. In one embodiment, write circuit 102 provides current through one of the memory cells 106 a-106 d and sense circuit 108 reads the voltage across that one of the memory cells 106 a-106 d.

To program a memory cell 106 a-106 d within memory device 100, write circuit 102 generates a current or voltage pulse for heating the phase-change material in the target memory cell. In one embodiment, write circuit 102 generates an appropriate current or voltage pulse, which is fed into distribution circuit 104 and distributed to the appropriate target memory cell 106 a-106 d. The current or voltage pulse amplitude and duration is controlled depending on whether the memory cell is being set or reset. Generally, a “set” operation of a memory cell is heating the phase change material of the target memory cell above its crystallization temperature (but below its melting temperature) long enough to achieve the crystalline state or a partially crystalline and partially amorphous state. Generally, a “reset” operation of a memory cell is heating the phase change material of the target memory cell above its melting temperature, and then quickly quench cooling the material, thereby achieving the amorphous state or a partially amorphous and partially crystalline state.

FIG. 2A illustrates a cross-sectional view of one embodiment of a phase change memory cell 200 a. Phase change memory cell 200 a includes a first electrode 202, phase change material 204, a second electrode 206, dielectric material 210 a, and insulation material 208. Phase change material 204 provides a storage location for storing one or more bits of data. First electrode 202 contacts phase change material 204, and phase change material 204 contacts second electrode 206. In one embodiment, first electrode 202 and second electrode 206 have larger cross-sectional widths than phase change material 204. Dielectric material 210 a laterally completely encloses phase change material 204. Insulation material 208 laterally completely encloses first electrode 202 and second electrode 206. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 200 a.

Insulation material 208 can be any suitable insulator, such as SiO₂, SiO_(x), SiN, fluorinated silica glass (FSG), boro-phosphorous silicate glass (BPSG), boro-silicate glass (BSG), or low-k material. Dielectric material 210 a can be any suitable dielectric material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, or low-k material. In one embodiment, dielectric material 210 a and insulation material 208 include the same material. In other embodiments, dielectric material 210 a has a lower thermal conductivity than insulation material 208. First electrode 202 and second electrode 206 can be any suitable electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, or Cu.

Phase change material 204 may be made up of a variety of materials in accordance with the present invention. Generally, chalcogenide alloys that contain one or more elements from group VI of the periodic table are useful as such materials. In one embodiment, phase change material 204 of memory cell 200 a is made up of a chalcogenide compound material, such as GeSbTe, SbTe, GeTe, or AgInSbTe. In another embodiment, phase change material 204 is chalcogen free, such as GeSb, GaSb, InSb, or GeGaInSb. In other embodiments, phase change material 204 is made up of any suitable material including one or more of the elements Ge, Sb, Te, Ga, As, In, Se, and S.

A selection device such as an active device like a transistor or diode, is coupled to first electrode 202 or second electrode 206 to control the application of current or voltage pulses to the other of first electrode 202 or second electrode 206, and thus to phase change material 204, to set and reset phase change material 204.

During operation of phase change memory cell 200 a, current or voltage pulses are applied between first electrode 202 and second electrode 206 to program phase change memory cell 200 a. During a set operation of phase change memory cell 200 a, a set current or voltage pulse is selectively enabled to first electrode 202 and sent through phase change material 204 thereby heating it above its crystallization temperature (but usually below its melting temperature). In this way, phase change material 204 reaches a crystalline state or a partially crystalline and partially amorphous state during the set operation. During a reset operation of phase change memory cell 200 a, a reset current or voltage pulse is selectively enabled to first electrode 202 and sent through phase change material 204. The reset current or voltage quickly heats phase change material 204 above its melting temperature. After the current or voltage pulse is turned off, phase change material 204 quickly quench cools into an amorphous state or a partially amorphous and partially crystalline state.

FIG. 2B illustrates a cross-sectional view of another embodiment of a phase change memory cell 200 b. Phase change memory cell 200 b is similar to phase change memory cell 200 a previously described and illustrated with reference to FIG. 2A, except that phase change memory cell 200 b includes etch stop material layer 212 and a phase change material layer stack 204 a-204 c. Etch stop material layer 212 is used during the fabrication process of phase change memory cell 200 b to prevent over etching into phase change material 204 when fabricating second electrode 206. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 200 b.

Phase change material layer stack 204 a-204 c includes two or more phase change material layers. At least two of the phase change materials layers 204 a-204 c include different phase change materials. In one embodiment, diffusion barrier layers, such as TiN, GeTe, or other suitable material, is deposited between adjacent phase change material layers 204 a-204 c, and/or between phase change material layer stack 204 a-204 c and first electrode 202, and/or between phase change material layer stack 204 a-204 c and second electrode 206. Phase change memory cell 200 b operates similarly to phase change memory cell 200 a.

The following FIGS. 3-12 illustrate embodiments of a method for fabricating a phase change memory cell, such as phase change memory cell 200 a previously described and illustrated with reference to FIG. 2A and phase change memory cell 200 b previously described and illustrated with reference to FIG. 2B.

FIG. 3 illustrates a cross-sectional view of one embodiment of a preprocessed wafer 220. Preprocessed wafer 220 includes first electrode 202, insulation material 208 a, and lower wafer layers (not shown). In one embodiment, first electrode 202 is a contact plug, such as a tungsten plug, copper plug, TiN plug, TaN plug, Al plug, or other suitable conducting material plug. In another embodiment, first electrode 202 is a dedicated contact electrode comprising TiN, TaN, TiAlN, TiSiN, TaSiN, or TaAlN. First electrode 202 is laterally surrounded by insulation material 208 a, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material, to electrically isolate first electrode 202 from adjacent device features.

FIG. 4A illustrates a cross-sectional view of one embodiment of preprocessed wafer 220 and a phase change material layer 203. A phase change material, such as a chalcogenide compound material or other suitable phase change material, is deposited over preprocessed wafer 220 to provide phase change material layer 203. Phase change material layer 203 is deposited using chemical vapor deposition (CVD), atomic layer deposition (ALD), metal organic chemical vapor deposition (MOCVD), plasma vapor deposition (PVD), jet vapor deposition (JVP), or other suitable deposition technique.

FIG. 4B illustrates a cross-sectional view of one embodiment of preprocessed wafer 220 and a stack of phase change material layers 203 a-203 c. In one embodiment, a stack of phase change material layers 203 a-203 c is used in place of the single phase change material layer 203 illustrated in FIG. 4A. A first phase change material, such as a chalcogenide compound material or other suitable phase change material, is deposited over preprocessed wafer 220 to provide first phase change material layer 203 a. First phase change material layer 203 a is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

A second phase change material, such as a chalcogenide compound material or other suitable phase change material, is deposited over first phase change material layer 203 a to provide second phase change material layer 203 b. Second phase change material layer 203 b is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

A third phase change material, such as a chalcogenide compound material or other suitable phase change material, is deposited over second phase change material layer 203 b to provide third phase change material layer 203 c. Third phase change material layer 203 c is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. In other embodiments, another suitable number of phase change material layers are deposited on preprocessed wafer 220.

In one embodiment, diffusion barrier layers, such as TiN, GeTe, or other suitable material, is deposited between adjacent phase change material layers 203 a-203 c, and/or between phase change material layer stack 203 a-203 c and first electrode 202, and/or on top of phase change material layer stack 203 a-203 c. Although the remainder of the description describes the embodiments of the methods for fabricating the phase change memory cells using a single phase change material layer, the stack of phase change material layers 203 a-203 c can be used in place of the single phase change material layer 203 illustrated in FIG. 4A.

FIG. 5 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, phase change material layer 203, and a resist mask layer 222 a. Resist material is deposited on phase change material layer 203 using spin on or another suitable technique. The resist material is patterned using photolithography or another suitable technique to provide resist mask layer 222 a. In one embodiment, resist mask layer 222 a is substantially centered over first electrode 202.

FIG. 6 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, phase change material layer 203, and resist mask layer 222 b after a resist trim process. Resist mask layer 222 a is trimmed using a resist trim process to provide resist mask layer 222 b having a smaller cross-sectional width than resist mask layer 222 a. In one embodiment, the resist trim process provides resist mask layer 222 b having a sublithographic cross-sectional width.

In another embodiment, instead of using a resist mask layer and a resist trim process as described and illustrated with reference to FIGS. 5 and 6, a hard mask process may be used. A hard mask material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, or other suitable hard mask material is deposited over phase change material layer 203 (FIG. 5) to provide a hard mask material layer. The hard mask material layer is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

Resist material is deposited over the hard mask material layer using spin on or another suitable technique. The resist material is patterned using photolithography or another suitable technique to provide a resist mask layer. In one embodiment, the resist mask layer is substantially centered over first electrode 202. The portions of the hard mask material layer that are not protected by the resist mask layer are etched to provide a hard mask. In one embodiment, the resist mask layer is trimmed as described with reference to FIG. 6 before the etch of the hard mask material layer.

In another embodiment, the hard mask material layer is trimmed after etching using a trim process to provide a hard mask having a smaller cross-sectional width. In one embodiment, the trim process provides a hard mask having a sublithographic cross-sectional width. In one embodiment, the resist mask layer is stripped after the hard mask trim. In another embodiment, the resist mask layer is stripped before the hard mask trim. In the following description, the hard mask may be used in place of resist mask layer 222 b.

FIG. 7 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220 and a storage location 204 after etching phase change material layer 203. The portions of phase change material layer 203 not protected by resist mask layer 222 b are etched to expose preprocessed wafer 220 and provide phase change material storage location 204. Resist mask layer 222 b is then removed.

FIG. 8 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, storage location 204, and a dielectric material layer 210 a. Dielectric material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of preprocessed wafer 220 and storage location 204. The dielectric material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The dielectric material is planarized using chemical mechanical planarization (CMP) or another suitable planarization technique to expose storage location 204 and provide dielectric material layer 210 a. In one embodiment, dielectric material layer 210 a and insulation material 208 a include the same material. In another embodiment, dielectric material layer 210 a has a lower thermal conductivity than insulation material 208 a.

FIG. 9A illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, storage location 204, dielectric material layer 210 a, and an insulation material layer 208 b. Insulation material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of dielectric material layer 210 a and storage location 204 to provide insulation material layer 208 b. Insulation material layer 208 b is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

FIG. 9B illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, storage location 204, dielectric material layer 210 a, an etch stop material layer 212 a, and an insulation material layer 208 b. In one embodiment, an etch stop material layer 212 a and an insulation material layer 208 b are used in place of insulation material layer 208 b illustrated in FIG. 9A. An etch stop material layer, such as SiN or another suitable etch stop material, is deposited over exposed portions of dielectric material layer 210 a and storage location 204 to provide etch stop material layer 212 a. Etch stop material layer 212 a is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

Insulation material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over etch stop material layer 212 a to provide insulation material layer 208 b. Insulation material layer 208 b is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. Although the remainder of the description describes the embodiments of the methods for fabricating the phase change memory cells without using etch stop material layer 212 a below insulation material layer 208 b, etch stop material layer 212 a and insulation material layer 208 b illustrated in FIG. 9B can be used in place of insulation material layer 208 b illustrated in FIG. 9A.

FIG. 10 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, storage location 204, dielectric material layer 210 a, and insulation material layer 208 c after etching an opening 224 in insulation material layer 208 b. Insulation material layer 208 c is etched to expose storage location 204 and provide opening 224. In one embodiment, opening 224 is substantially centered over storage location 204.

Electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, Cu, or other suitable electrode material, is deposited over exposed portions of insulation material layer 208 c, dielectric material layer 210 a, and storage location 204. The electrode material layer is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The electrode material layer is planarized using CMP or another suitable planarization technique to expose insulation material layer 208 c and form second electrode 206. This process provides phase change memory cell 200 a as illustrated in FIG. 2A or phase change memory cell 200 b as illustrated in FIG. 2B.

The following FIGS. 11 and 12 illustrate another embodiment for fabricating second electrode 206 that can be used in place of the process described with reference to FIGS. 9A-10.

FIG. 11 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, storage location 204, dielectric material layer 210 a, and an electrode material layer 206 a. Electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, Cu, or other suitable electrode material, is deposited over exposed portions of dielectric material layer 210 a and storage location 204 to provide electrode material layer 206 a. Electrode material layer 206 a is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

FIG. 12 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, storage location 204, dielectric material layer 210 a, and second electrode 206 after etching electrode material layer 206 a. Electrode material layer 206 a is etched to expose dielectric material layer 210 a and provide second electrode 206. In one embodiment, second electrode 206 is substantially centered over storage location 204.

Insulation material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of second electrode 206 and dielectric material layer 210 a. The insulation material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The insulation material is planarized using CMP or another suitable planarization technique to expose second electrode 206 and provide phase change memory cell 200 a as illustrated in FIG. 2A or phase change memory cell 200 b as illustrated in FIG. 2B.

FIG. 13A illustrates a cross-sectional view of another embodiment of a phase change memory cell 230 a. Phase change memory cell 230 a is similar to phase change memory cell 200 a previously described and illustrated with reference to FIG. 2A, except that phase change memory cell 230 a includes a bottom contact or electrode 232. Bottom contact 232 contacts first electrode 202 and phase change material 204. Bottom contact 232 is laterally completely surrounded by insulation material 208. Bottom contact 232 includes any suitable electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, or Cu. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 230 a. Phase change memory cell 230 a operates similarly to phase change memory cell 200 a.

FIG. 13B illustrates a cross-sectional view of another embodiment of a phase change memory cell 230 b. Phase change memory cell 230 b is similar to phase change memory cell 230 a previously described and illustrated with reference to FIG. 13A, except that phase change memory cell 230 b includes etch stop material layer 212 and phase change material layer stack 204 a-204 c as previously described with reference to phase change memory cell 200 b illustrated in FIG. 2B. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 230 b. Phase change memory cell 230 b operates similarly to phase change memory cell 200 a.

The following FIGS. 14-19 illustrate embodiments of a method for fabricating a phase change memory cell, such as phase change memory cell 230 a previously described and illustrated with reference to FIG. 13A and phase change memory cell 230 b previously described and illustrated with reference to FIG. 13B. The fabrication process begins with a preprocessed wafer 220 as previously described and illustrated with reference to FIG. 3.

FIG. 14 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220 and a contact material layer 232 a. Electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, Cu, or other suitable electrode material, is deposited over preprocessed wafer 220 to provide contact material layer 232 a. Contact material layer 232 a is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

FIG. 15 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220 and a bottom contact 232 after etching contact material layer 232 a. Contact material layer 232 a is etched to expose preprocessed wafer 220 and provide bottom contact 232. In one embodiment, bottom contact 232 is substantially centered over first electrode 202. In one embodiment, bottom contact 232 completely covers the top of first electrode 202. In other embodiments, bottom contact 232 partially covers the top of first electrode 202.

FIG. 16 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, bottom contact 232, and an insulation material layer 208 d. Insulation material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of preprocessed wafer 220 and bottom contact 232. The insulation material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The insulation material is planarized using CMP or another suitable planarization technique to expose bottom contact 232 and provide insulation material layer 208 d.

The following FIGS. 17-19 illustrate another embodiment of a process for fabricating bottom contact 232 that can be used in place of the process described and illustrated with reference to FIGS. 14-16.

FIG. 17 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220 and an insulation material layer 208 e. Insulation material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over preprocessed wafer 220 to provide insulation material layer 208 e. Insulation material layer 208 e is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

FIG. 18 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220 and insulation material 208 d after etching an opening 234 in insulation material layer 208 e. Insulation material layer 208 e is etched to expose first electrode 202 and provide opening 234. In one embodiment, opening 234 is substantially centered over first electrode 202. In one embodiment, opening 234 completely exposes the top of first electrode 202. In other embodiments, opening 234 partially exposes the top of first electrode 202.

FIG. 19 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, insulation material 208 d, and bottom contact 232. Electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, Cu, or other suitable electrode material, is deposited over exposed portions of insulation material layer 208 d and preprocessed wafer 220. The electrode material layer is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The electrode material layer is planarized using CMP or another suitable planarization technique to expose insulation material layer 208 d and form bottom contact 232. The process previously described with reference to FIGS. 4A-12 is then performed using preprocessed wafer 220 and bottom contact 232 to fabricate phase change memory cell 230 a illustrated in FIG. 13A or phase change memory cell 230 b illustrated in FIG. 13B.

FIG. 20A illustrates a cross-sectional view of another embodiment of a phase change memory cell 240 a. Phase change memory cell 240 a is similar to phase change memory cell 230 a previously described and illustrated with reference to FIG. 13A, except that in phase change memory cell 240 a, dielectric material layer 210 a is replaced with dielectric material layer 210 b, which is laterally surrounded by insulation material 208. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 240 a. Phase change memory cell 240 a operates similarly to phase change memory cell 200 a.

FIG. 20B illustrates a cross-sectional view of another embodiment of a phase change memory cell 240 b. Phase change memory cell 240 b is similar to phase change memory cell 240 a previously described and illustrated with reference to FIG. 20A, except that phase change memory cell 240 b includes etch stop material layer 212 and phase change material layer stack 204 a-204 c as previously described with reference to phase change memory cell 200 b illustrated in FIG. 2B. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 240 b. Phase change memory cell 240 b operates similarly to phase change memory cell 200 a.

The following FIGS. 21-28 illustrate embodiments of a method for fabricating a phase change memory cell, such as phase change memory cell 240 a previously described and illustrated with reference to FIG. 20A and phase change memory cell 240 b previously described and illustrated with reference to FIG. 20B.

FIG. 21 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220. Preprocessed wafer 220 includes first electrode 202, insulation material 208 a, and lower wafer layers (not shown). In one embodiment, first electrode 202 is a contact plug, such as a tungsten plug, copper plug, TiN plug, TaN plug, Al plug, or other suitable conducting material plug. In another embodiment, first electrode 202 is a dedicated contact electrode comprising TiN, TaN, TiAlN, TiSiN, TaSiN, or TaAlN. First electrode 202 is laterally surrounded by insulation material 208 a, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material, to electrically isolate first electrode 202 from adjacent device features.

FIG. 22 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, a contact material layer 232 a, and a phase change material layer 203. Electrode material, such as TiN, TaN, W, Al, TiSiN, TiAlN, TaSiN, TaAlN, WN, Cu, or other suitable electrode material, is deposited over preprocessed wafer 220 to provide contact material layer 232 a. Contact material layer 232 a is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

A phase change material, such as a chalcogenide compound material or other suitable phase change material, is deposited over contact material layer 232 a to provide phase change material layer 203. Phase change material layer 203 is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

FIG. 23 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, contact material layer 232 a, phase change material layer 203, and a resist mask layer 222 a. Resist material is deposited on phase change material layer 203 using spin on or another suitable technique. The resist material is patterned using photolithography or another suitable technique to provide resist mask layer 222 a. In one embodiment, resist mask layer 222 a is substantially centered over first electrode 202.

FIG. 24 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, contact material layer 232 a, phase change material layer 203, and resist mask layer 222 b after a resist trim process. Resist mask layer 222 a is trimmed using a resist trim process to provide resist mask layer 222 b having a smaller cross-sectional width than resist mask layer 222 a. In one embodiment, the resist trim process provides resist mask layer 222 b having a sublithographic cross-sectional width.

In another embodiment, instead of using a resist mask layer and a resist trim process as described and illustrated with reference to FIGS. 23 and 24, a hard mask process may be used. A hard mask material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, or other suitable hard mask material is deposited over phase change material layer 203 (FIG. 23) to provide a hard mask material layer. The hard mask material layer is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique.

Resist material is deposited over the hard mask material layer using spin on or another suitable technique. The resist material is patterned using photolithography or another suitable technique to provide a resist mask layer. In one embodiment, the resist mask layer is substantially centered over first electrode 202. The portions of the hard mask material layer that are not protected by the resist mask layer are etched to provide a hard mask. In one embodiment, the resist mask layer is trimmed as described with reference to FIG. 24 before the etch of the hard mask material layer.

In another embodiment, the hard mask material layer is trimmed after etching using a trim process to provide a hard mask having a smaller cross-sectional width. In one embodiment, the trim process provides a hard mask having a sublithographic cross-sectional width. In one embodiment, the resist mask layer is stripped after the hard mask trim. In another embodiment, the resist mask layer is stripped before the hard mask trim. In the following description, the hard mask may be used in place of resist mask layer 222 b.

FIG. 25 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, contact material layer 232 a, and a storage location 204 after etching phase change material layer 203. The portions of phase change material layer 203 not protected by resist mask layer 222 b are etched to expose contact material layer 232 a and provide phase change material storage location 204. Resist mask layer 222 b is then removed.

FIG. 26 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, contact material layer 232 a, storage location 204, and a dielectric material layer 210 a. Dielectric material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of preprocessed wafer 220 and storage location 204. The dielectric material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The dielectric material is planarized using CMP or another suitable planarization technique to expose storage location 204 and provide dielectric material layer 210 a. In one embodiment, dielectric material 210 a and insulation material 208 a include the same material. In another embodiment, dielectric material 210 a has a lower thermal conductivity than insulation material 208 a.

FIG. 27 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, a bottom contact 232, storage location 204, and dielectric material 210 b after etching dielectric material layer 210 a and contact material layer 232 a. Dielectric material layer 210 a and contact material layer 232 a are etched to expose preprocessed wafer 220 and provide dielectric material layer 210 b and bottom contact 232.

FIG. 28 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, bottom contact 232, storage location 204, dielectric material 210 b, and insulation material 208 f. Insulation material, such as Sio₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of preprocessed wafer 220, bottom contact 232, dielectric material layer 210 b, and storage location 204. The insulation material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The insulation material is planarized using CMP or another suitable planarization technique to expose storage location 204 and dielectric material layer 210 b and to provide insulation material layer 208 f. The process previously described with reference to FIGS. 9A-12 is then performed to fabricate second electrode 206 of phase change memory cell 240 a as illustrated in FIG. 20A or phase change memory cell 240 b as illustrated in FIG. 20B.

FIG. 29A illustrates a cross-sectional view of another embodiment of a phase change memory cell 250 a. Phase change memory cell 250 a is similar to phase change memory cell 200 a previously described and illustrated with reference to FIG. 2A, except that in phase change memory cell 250 a dielectric material layer 210 a is replaced with dielectric material layer 210 c. Dielectric material layer 210 c surrounds phase change material 204 and surrounds the bottom portion of second electrode 206. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 250 a. Phase change memory cell 250 a operates similarly to phase change memory cell 200 a.

FIG. 29B illustrates a cross-sectional view of another embodiment of a phase change memory cell 250 b. Phase change memory cell 250 b is similar to phase change memory cell 250 a previously described and illustrated with reference to FIG. 29A, except that phase change memory cell 250 b includes etch stop material layer 212 and phase change material layer stack 204 a-204 c as previously described with reference to phase change memory cell 200 b illustrated in FIG. 2B. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 250 b. Phase change memory cell 250 b operates similarly to phase change memory cell 200 a.

The following FIG. 30 illustrates embodiments of a method for fabricating a phase change memory cell, such as phase change memory cell 250 a previously described and illustrated with reference to FIG. 29A and phase change memory cell 250 b previously described and illustrated with reference to FIG. 29B. The fabrication process begins by performing the steps previously described and illustrated with reference to FIGS. 3-7.

FIG. 30 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, storage location 204, and a dielectric material layer 210 d. Dielectric material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of preprocessed wafer 220 and storage location 204. The dielectric material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The dielectric material is planarized using CMP or another suitable planarization technique without exposing storage location 204 to provide dielectric material layer 210 d.

Storage location 204 is protected from the planarization by the portion of dielectric material layer 210 d capping storage location 204. In one embodiment, dielectric material 210 d and insulation material 208 a include the same material. In another embodiment, dielectric material 210 d has a lower thermal conductivity than insulation material 208 a. The process previously described with reference to FIGS. 9A-10 is then performed to fabricate second electrode 206, except that dielectric material layer 210 d is also etched to provide opening 224 illustrated in FIG. 10. This process is used to fabricate phase change memory cell 250 a as illustrated in FIG. 29A or phase change memory cell 250 b as illustrated in FIG. 29B.

FIG. 31A illustrates a cross-sectional view of another embodiment of a phase change memory cell 260 a. Phase change memory cell 260 a is similar to phase change memory cell 250 a previously described and illustrated with reference to FIG. 29A, except that phase change memory cell 260 a includes bottom contact 232 as previously described with reference to phase change memory cell 230 a illustrated in FIG. 13A. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 260 a. Phase change memory cell 260 a operates similarly to phase change memory cell 200 a.

FIG. 31B illustrates a cross-sectional view of another embodiment of a phase change memory cell 260 b. Phase change memory cell 260 b is similar to phase change memory cell 260 a previously described and illustrated with reference to FIG. 31 A, except that phase change memory cell 260 b includes etch stop material layer 212 and phase change material layer stack 204 a-204 c as previously described with reference to phase change memory cell 200 b illustrated in FIG. 2B. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 260 b. Phase change memory cell 260 b operates similarly to phase change memory cell 200 a.

Phase change memory cell 260 a and phase change memory cell 260 b are fabricated using the processes previously described and illustrated with reference to FIGS. 14-19 (fabricating bottom contact 232), FIG. 30 (fabricating storage location 204 and dielectric material layer 210 c), and FIGS. 9A-10 (fabricating second electrode 206).

FIG. 32A illustrates a cross-sectional view of another embodiment of a phase change memory cell 270 a. Phase change memory cell 270 a is similar to phase change memory cell 230 a previously described and illustrated with reference to FIG. 13A, except that in phase change memory cell 270 a dielectric material layer 210 a is replaced with dielectric material layer 210 e. Dielectric material layer 210 e surrounds phase change material 204 and surrounds the bottom portion of second electrode 206. Dielectric material layer 210 e is laterally surrounded by insulation material 208. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 270 a. Phase change memory cell 270 a operates similarly to phase change memory cell 200 a.

FIG. 32B illustrates a cross-sectional view of another embodiment of a phase change memory cell 270 b. Phase change memory cell 270 b is similar to phase change memory cell 270 a previously described and illustrated with reference to FIG. 32A, except that phase change memory cell 270 b includes etch stop material layer 212 and phase change material layer stack 204 a-204 c as previously described with reference to phase change memory cell 200 b illustrated in FIG. 2B. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 270 b. Phase change memory cell 270 b operates similarly to phase change memory cell 200 a.

The following FIG. 33 illustrates embodiments of a method for fabricating a phase change memory cell, such as phase change memory cell 270 a previously described and illustrated with reference to FIG. 32A and phase change memory cell 270 b previously described and illustrated with reference to FIG. 32B. The fabrication process begins by performing the steps previously described and illustrated with reference to FIGS. 21-25.

FIG. 33 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, contact material layer 232 a, storage location 204, and a dielectric material layer 210 d. Dielectric material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of contact material layer 232 a and storage location 204. The dielectric material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The dielectric material is planarized using CMP or another suitable planarization technique without exposing storage location 204 to provide dielectric material layer 210 d.

Storage location 204 is protected from the planarization by the portion of dielectric material layer 210 d capping storage location 204. In one embodiment, dielectric material 210 d and insulation material 208 a include the same material. In another embodiment, dielectric material 210 d has a lower thermal conductivity than insulation material 208 a. The process previously described with reference to FIGS. 27-28 (etching dielectric material layer 210 d and contact material layer 232 a) and FIGS. 9A-10 (fabricating second electrode 206) is then performed, except that dielectric material layer 210 d is also etched to provide opening 224 illustrated in FIG. 10. This process is used to fabricate phase change memory cell 270 a as illustrated in FIG. 32A or phase change memory cell 270 b as illustrated in FIG. 32B.

FIG. 34A illustrates a cross-sectional view of another embodiment of a phase change memory cell 280 a. Phase change memory cell 280 a is similar to phase change memory cell 230 a previously described and illustrated with reference to FIG. 13A, except that in phase change memory cell 280 a bottom contact 232 has the same cross-sectional width as phase change material 204 and both phase change material 204 and bottom contact 232 are laterally surrounded by dielectric material layer 210 f. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 280 a. Phase change memory cell 280 a operates similarly to phase change memory cell 200 a.

FIG. 34B illustrates a cross-sectional view of another embodiment of a phase change memory cell 280 b. Phase change memory cell 280 b is similar to phase change memory cell 280 a previously described and illustrated with reference to FIG. 34A, except that phase change memory cell 280 b includes etch stop material layer 212 and phase change material layer stack 204 a-204 c as previously described with reference to phase change memory cell 200 b illustrated in FIG. 2B. In one embodiment, each of the memory cells 106 a-106 d is similar to phase change memory cell 280 b. Phase change memory cell 280 b operates similarly to phase change memory cell 200 a.

The following FIG. 35 illustrates embodiments of a method for fabricating a phase change memory cell, such as phase change memory cell 280 a previously described and illustrated with reference to FIG. 34A and phase change memory cell 280 b previously described and illustrated with reference to FIG. 34B. The fabrication process begins by performing the steps previously described and illustrated with reference to FIGS. 21-24.

FIG. 35 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, a bottom contact 232, and a storage location 204 after etching phase change material layer 203 and contact material layer 232 a. The portions of phase change material layer 203 and contact material layer 232 a not protected by resist mask layer 222 b are etched to expose preprocessed wafer 220 and provide phase change material storage location 204 and bottom contact 232. Resist mask layer 222 b is then removed.

FIG. 36 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220, bottom contact 232, storage location 204, and a dielectric material layer 210 f. Dielectric material, such as SiO₂, SiO_(x), SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of preprocessed wafer 220, bottom contact 232, and storage location 204. The dielectric material is deposited using CVD, ALD, MOCVD, PVD, JVP, or other suitable deposition technique. The dielectric material is planarized using CMP or another suitable planarization technique to expose storage location 204 and provide dielectric material layer 210 f. In one embodiment, dielectric material layer 210 f and insulation material 208 a include the same material. In another embodiment, dielectric material layer 210 f has a lower thermal conductivity than insulation material 208 a. The process previously described with reference to FIGS. 9A-12 is then performed to fabricate second electrode 206 of phase change memory cell 280 a as illustrated in FIG. 34A or phase change memory cell 280 b as illustrated in FIG. 34B.

Embodiments of the present invention provide a fabrication process for fabricating pillar type phase change memory cells. The phase change material storage location for each memory cell is fabricated using a first deposition, patterning, and etching process. After the phase change material storage location is formed, the second electrode contacting the storage location is fabricated using a second deposition, patterning, and etching process. In this way, the structural integrity of the memory cell is maintained during the fabrication process.

Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that a variety of alternate and/or equivalent implementations may be substituted for the specific embodiments shown and described without departing from the scope of the present invention. This application is intended to cover any adaptations or variations of the specific embodiments discussed herein. Therefore, it is intended that this invention be limited only by the claims and the equivalents thereof. 

1. A memory cell comprising: a first electrode; a storage location comprising phase change material and contacting the first electrode, the storage location having a first cross-sectional width; and a second electrode contacting the storage location, the second electrode having a second cross-sectional width greater than the first cross-sectional width, wherein the first electrode, the storage location, and the second electrode form a pillar phase change memory cell.
 2. The memory cell of claim 1, wherein the storage location comprises a stack of phase change material layers.
 3. The memory cell of claim 1, wherein the phase change material comprises at least one of Ge, Sb, Te, Ga, As, In, Se, and S.
 4. The memory cell of claim 1, further comprising: an insulation material laterally surrounding a first portion of the second electrode; and an etch stop layer laterally surrounding a second portion of the second electrode.
 5. The memory cell of claim 1, further comprising: an insulation material laterally surrounding a first portion of the second electrode; and a dielectric material laterally surrounding a second portion of the second electrode.
 6. The memory cell of claim 1, further comprising: an insulation material laterally surrounding a first portion of the second electrode; a dielectric material laterally surrounding a second portion of the second electrode; and an etch stop layer laterally surrounding a third portion of the second electrode.
 7. A memory cell comprising: a first electrode; a contact contacting the first electrode; a storage location comprising phase change material and contacting the contact, the storage location having a first cross-sectional width; and a second electrode contacting the storage location, the second electrode having a second cross-sectional width greater than the first cross-sectional width, wherein the first electrode, the contact, the storage location, and the second electrode form a pillar phase change memory cell.
 8. The memory cell of claim 7, wherein the storage location comprises a stack of phase change material layers.
 9. The memory cell of claim 7, wherein the phase change material comprises at least one of Ge, Sb, Te, Ga, As, In, Se, and S.
 10. The memory cell of claim 7, wherein the contact has a cross-sectional width substantially equal to the first cross-sectional width.
 11. The memory cell of claim 7, further comprising: an insulation material laterally surrounding a first portion of the second electrode; and an etch stop layer laterally surrounding a second portion of the second electrode.
 12. The memory cell of claim 7, wherein the contact has a cross-sectional width greater than the first cross-sectional width.
 13. The memory cell of claim 12, further comprising: a first insulation material laterally surrounding the contact; and a dielectric material laterally surrounding the storage location.
 14. The memory cell of claim 13, further comprising: a second insulation material laterally surrounding the second electrode.
 15. The memory cell of claim 13, further comprising: a second insulation material laterally surrounding a first portion of the second electrode; and an etch stop layer laterally surrounding a second portion of the second electrode.
 16. The memory cell of claim 13, further comprising: a second insulation material laterally surrounding a first portion of the second electrode, wherein the dielectric material laterally surrounds a second portion of the second electrode.
 17. The memory cell of claim 13, further comprising: a second insulation material laterally surrounding a first portion of the second electrode; and an etch stop layer laterally surrounding a second portion of the second electrode, wherein the dielectric material laterally surrounds a third portion of the second electrode.
 18. The memory cell of claim 7, further comprising: dielectric material laterally surrounding the storage location; and a first insulation material laterally surrounding the dielectric material and the contact.
 19. The memory cell of claim 18, further comprising: a second insulation material laterally surrounding the second electrode.
 20. The memory cell of claim 18, further comprising: a second insulation material laterally surrounding a first portion of the second electrode; and an etch stop layer laterally surrounding a second portion of the second electrode.
 21. The memory cell of claim 18, further comprising: a second insulation material laterally surrounding a first portion of the second electrode, wherein the dielectric material laterally surrounds a second portion of the second electrode.
 22. The memory cell of claim 18, further comprising: a second insulation material laterally surrounding a first portion of the second electrode; and an etch stop layer laterally surrounding a second portion of the second electrode, wherein the dielectric material laterally surrounds a third portion of the second electrode.
 23. A method for fabricating a memory cell, the method comprising: providing a wafer including a first electrode; depositing a phase change material layer over the wafer; etching the phase change material layer to form a storage location; depositing a first insulation material layer over exposed portions of the wafer and the storage location; planarizing the first insulation material layer to expose the storage location; and fabricating a second electrode contacting the storage location.
 24. The method of claim 23, wherein fabricating the second electrode comprises: depositing a second insulation material layer over the planarized first insulation material layer and the storage location; etching a first opening in the second insulation material layer to expose the storage location; depositing a first electrode material layer over exposed portions of the etched second insulation material layer and the storage location; and planarizing the first electrode material layer to form the second electrode.
 25. The method of claim 24, further comprising: depositing an etch stop material layer over the planarized first insulation material layer and the storage location before depositing the second insulation material layer; and etching the etch stop material layer to expose the storage location after etching the first opening in the second insulation material layer.
 26. The method of claim 23, wherein fabricating the second electrode comprises: depositing a first electrode material layer over exposed portions of the planarized first insulation material layer and the storage location; etching the first electrode material layer to form the second electrode; depositing a second insulation material layer over exposed portions of the planarized first insulation material layer and the second electrode; and planarizing the second insulation material layer to expose the second electrode.
 27. The method of claim 23, wherein depositing the phase change material layer comprises depositing a stack of phase change material layers.
 28. The method of claim 23, wherein etching the phase change material layer to form the storage location comprises: depositing a resist material layer over the phase change material layer; patterning the resist material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 29. The method of claim 28, wherein patterning the resist material layer comprises trimming the resist material layer to form a mask having a sublithographic cross-sectional width.
 30. The method of claim 23, wherein etching the phase change material layer to form the storage location comprises: depositing a hard mask material layer over the phase change material layer; etching the hard mask material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 31. The method of claim 30, further comprising: trimming the mask to provide a mask having a sublithographic cross-sectional width.
 32. The method of claim 23, wherein providing the wafer including the first electrode comprises: providing a preprocessed wafer including a contact plug; depositing a first electrode material layer over the preprocessed wafer; etching the first electrode material layer to form the first electrode; depositing a second insulation material layer over exposed portions of the preprocessed wafer and the first electrode; and planarizing the second insulation material layer to expose the first electrode.
 33. The method of claim 23, wherein providing the wafer including the first electrode comprises: providing a preprocessed wafer including a contact plug; depositing a second insulation material layer over the preprocessed wafer; etching an opening in the second insulation material layer to expose the contact plug; depositing a first electrode material layer over exposed portions of the preprocessed wafer and the second insulation material layer; and planarizing the first electrode material layer to form the first electrode.
 34. A method for fabricating a memory cell, the method comprising: providing a preprocessed wafer including a contact plug; depositing a first electrode material layer over the preprocessed wafer; depositing a phase change material layer over the first electrode material layer; etching the phase change material layer to form a storage location; depositing a first insulation material layer over exposed portions of the first electrode material layer and the storage location; planarizing the first insulation material layer to expose the storage location; etching the planarized first insulation material layer and the first electrode material layer to form a first electrode; depositing a second insulation material layer over exposed portions of the preprocessed wafer, the first electrode, the etched first insulation material layer, and the storage location; planarizing the second insulation material layer to expose the storage location; and fabricating a second electrode contacting the storage location.
 35. The method of claim 34, wherein fabricating the second electrode comprises: depositing a third insulation material layer over exposed portions of the storage location, the etched first insulation material layer, and the planarized second insulation material layer; etching an opening in the third insulation material layer to expose the storage location; depositing a second electrode material layer over exposed portions of the third insulation material layer and the storage location; and planarizing the second electrode material layer to form the second electrode.
 36. The method of claim 35, further comprising: depositing an etch stop material layer over exposed portions of the etched first insulation material layer, the planarized second insulation material layer, and the storage location before depositing the third insulation material layer; and etching the etch stop material layer to expose the storage location after etching the opening in the third insulation material layer.
 37. The method of claim 34, wherein fabricating the second electrode comprises: depositing a second electrode material layer over exposed portions of the storage location, the etched first insulation material layer, and the planarized second insulation material layer; etching the second electrode material layer to form the second electrode; depositing a third insulation material layer over exposed portions of the etched first insulation material layer, the planarized second insulation material layer, and the second electrode; and planarizing the third insulation material layer to expose the second electrode.
 38. The method of claim 34, wherein depositing the phase change material layer comprises depositing a stack of phase change materials layers.
 39. The method of claim 34, wherein etching the phase change material layer to form the storage location comprises: depositing a resist material layer over the phase change material layer; patterning the resist material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 40. The method of claim 39, wherein patterning the resist material layer comprises trimming the resist material layer to form a mask having a sublithographic cross-sectional width.
 41. The method of claim 34, wherein etching the phase change material layer to form the storage location comprises: depositing a hard mask material layer over the phase change material layer; etching the hard mask material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 42. The method of claim 41, further comprising: trimming the mask to provide a mask having a sublithographic cross-sectional width.
 43. A method for fabricating a memory cell, the method comprising: providing a wafer including a first electrode; depositing a phase change material layer over the wafer; etching the phase change material layer to form a storage location; depositing a first insulation material layer over exposed portions of the wafer and the storage location; planarizing the first insulation material layer without exposing the storage location; depositing a second insulation material layer over the planarized first insulation material layer; etching a first opening in the second insulation material layer and the planarized first insulation material layer to expose the storage location; depositing a first electrode material layer over exposed portions of the second insulation material layer, the planarized first insulation material layer, and the storage location; and planarizing the first electrode material layer to form a second electrode.
 44. The method of claim 43, wherein depositing the phase change material layer comprises depositing a stack of phase change material layers.
 45. The method of claim 43, wherein etching the phase change material layer to form the storage location comprises: depositing a resist material layer over the phase change material layer; patterning the resist material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 46. The method of claim 45, wherein patterning the resist material layer comprises trimming the resist material layer to form a mask having a sublithographic cross-sectional width.
 47. The method of claim 43, wherein etching the phase change material layer to form the storage location comprises: depositing a hard mask material layer over the phase change material layer; etching the hard mask material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 48. The method of claim 47, further comprising: trimming the mask to provide a mask having a sublithographic cross-sectional width.
 49. The method of claim 43, further comprising: depositing an etch stop material layer over the planarized first insulation material layer before depositing the second insulation material layer; and etching the etch stop material layer to expose the storage location after etching the first opening in the second insulation material layer.
 50. The method of claim 43, wherein providing the wafer including the first electrode comprises: providing a preprocessed wafer including a contact plug; depositing a second electrode material layer over the preprocessed wafer; etching the second electrode material layer to form the first electrode; depositing a third insulation material layer over exposed portions of the preprocessed wafer and the first electrode; and planarizing the third insulation material layer to expose the first electrode.
 51. The method of claim 43, wherein providing the wafer including the first electrode comprises: providing a preprocessed wafer including a contact plug; depositing a third insulation material layer over the preprocessed wafer; etching a second opening in the third insulation material layer to expose the contact plug; depositing a second electrode material layer over exposed portions of the preprocessed wafer and the third insulation material layer; and planarizing the second electrode material layer to form the first electrode.
 52. A method for fabricating a memory cell, the method comprising: providing a preprocessed wafer including a contact plug; depositing a first electrode material layer over the preprocessed wafer; depositing a phase change material layer over the first electrode material layer; etching the phase change material layer to form a storage location; depositing a first insulation material layer over exposed portions of the first electrode material layer and the storage location; planarizing the first insulation material layer without exposing the storage location; etching the planarized first insulation material layer and the first electrode material layer to form a first electrode; depositing a second insulation material layer over exposed portions of the preprocessed wafer, the first electrode, and the etched first insulation material layer; planarizing the second insulation material layer to expose the planarized first insulation material layer; depositing a third insulation material layer over exposed portions of the etched first insulation material layer and the planarized second insulation material layer; etching an opening in the third insulation material layer and the planarized first insulation material layer to expose the storage location; depositing a second electrode material layer over exposed portions of the third insulation material layer, the first insulation material layer, and the storage location; and planarizing the second electrode material layer to form a second electrode.
 53. The method of claim 52, wherein depositing the phase change material layer comprises depositing a stack of phase change material layers.
 54. The method of claim 52, wherein etching the phase change material layer to form the storage location comprises: depositing a resist material layer over the phase change material layer; patterning the resist material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 55. The method of claim 54, wherein patterning the resist material layer comprises trimming the resist material layer to form a mask having a sublithographic cross-sectional width.
 56. The method of claim 52, wherein etching the phase change material layer to form the storage location comprises: depositing a hard mask material layer over the phase change material layer; etching the hard mask material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 57. The method of claim 56, further comprising: trimming the mask to provide a mask having a sublithographic cross-sectional width.
 58. The method of claim 52, further comprising: depositing an etch stop material layer over the etched first insulation material layer and the planarized second insulation material layer before depositing the third insulation material layer; and etching the etch stop material layer to expose the storage location after etching the opening in the third insulation material layer.
 59. A method for fabricating a memory cell, the method comprising: providing a preprocessed wafer including a contact plug; depositing a first electrode material layer over the preprocessed wafer; depositing a phase change material layer over the first electrode material layer; etching the phase change material layer and the first electrode material layer to form a storage location and a first electrode; depositing a first insulation material layer over exposed portions of the preprocessed wafer, the first electrode, and the storage location; planarizing the first insulation material layer to expose the storage location; and fabricating a second electrode contacting the storage location.
 60. The method of claim 59, wherein fabricating the second electrode comprises: depositing a second insulation material layer over exposed portions of the planarized first insulation material layer and the storage location; etching an opening in the second insulation material layer to expose the storage location; depositing a second electrode material layer over exposed portions of the etched second insulation material layer and the storage location; and planarizing the second electrode material layer to form a second electrode.
 61. The method of claim 60, further comprising: depositing an etch stop material layer over exposed portions of the planarized first insulation material layer and the storage location before depositing the second insulation material layer; and etching the etch stop material layer to expose the storage location after etching the opening in the second insulation material layer.
 62. The method of claim 59, wherein fabricating the second electrode comprises: depositing a second electrode material layer over exposed portions of the planarized first insulation material layer and the storage location; etching the second electrode material layer to form the second electrode; depositing a second insulation material layer over exposed portions of the planarized first insulation material layer and the second electrode; and planarizing the second insulation material layer to expose the second electrode.
 63. The method of claim 59, wherein depositing the phase change material layer comprises depositing a stack of phase change material layers.
 64. The method of claim 59, wherein etching the phase change material layer and the first electrode material layer to form the storage location and the first electrode comprises: depositing a resist material layer over the phase change material layer; patterning the resist material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer; and etching a portion of the first electrode material layer not protected by the first portion of the phase change material layer.
 65. The method of claim 64, wherein patterning the resist material layer comprises trimming the resist material layer to provide a mask having a sublithographic cross-sectional width.
 66. The method of claim 59, wherein etching the phase change material layer to form the storage location comprises: depositing a hard mask material layer over the phase change material layer; etching the hard mask material layer to form a mask protecting a first portion of the phase change material layer and exposing a second portion of the phase change material layer; and etching the second portion of the phase change material layer.
 67. The method of claim 66, further comprising: trimming the mask to provide a mask having a sublithographic cross-sectional width. 